用於厚膜元件與電路的被動修阻與功能性修阻的雷射修阻機

Laser | |
Type | Diode-Pumped Solid-State Laser |
Wavelength | 1064 nm |
Output Power | 7 W (Optional) |
Pulse Width | < 180 nsec (Optional) |
Optical | |
Field Size | 90 x 90 mm |
Repeatability | < 2μm |
Resolution | < 1.5μm |
Spot Size | < 40 μm |
Focus Length | 160 mm |
Measurement (DMM) | |
Type | Internal |
Range (Resistance) | 1Ω ~ 30 MΩ |
Accuracy | 0.04% Midrange |
Repeatability | 0.04% Midrange |
Measurement Time | < 2 μsec |
Positioning | |
X and Y Axis | Step Motor with Feedback |
Z Axis | Optional |
θ Axis | Step Motor(Optional) |
Prober Axis | Step Motor |
Load/Unload | Optional |
Controller | |
National Instruments PXIe Series Controller | |
Switching Matrix | |
Channel | 32 |
Switch Type | Dry Reed Relay |
Relay Life | 10^8 Cycles (10V, 100mA) |
Insulation | > 10GΩ |
Switching Time | 555 μsec |
Interface | |
USB/Ethernet/GPIB/RS232 | |
Physical Characteristics | |
Dimensions | L 1950 x W 960 x H 1350 mm |
Weight | 924 kg |
Utilities Requirements | |
Power | 220 V AC, one phase, 10A ( 50/60Hz) |
Air | 80~100 psi / flow rate 10 cfm |
Vacuum | 100 CFM factory vacuum for substrates retention |