用於厚膜元件與電路的被動修阻與功能性修阻的雷射修阻機
| Laser | |
| Type | Diode-Pumped Solid-State Laser |
| Wavelength | 1064 nm |
| Output Power | 7 W (Optional) |
| Pulse Width | < 180 nsec (Optional) |
| Optical | |
| Field Size | 90 x 90 mm |
| Repeatability | < 2μm |
| Resolution | < 1.5μm |
| Spot Size | < 40 μm |
| Focus Length | 160 mm |
| Measurement (DMM) | |
| Type | Internal |
| Range (Resistance) | 1Ω ~ 30 MΩ |
| Accuracy | 0.04% Midrange |
| Repeatability | 0.04% Midrange |
| Measurement Time | < 2 μsec |
| Positioning | |
| X and Y Axis | Step Motor with Feedback |
| Z Axis | Optional |
| θ Axis | Step Motor(Optional) |
| Prober Axis | Step Motor |
| Load/Unload | Optional |
| Controller | |
| National Instruments PXIe Series Controller | |
| Switching Matrix | |
| Channel | 32 |
| Switch Type | Dry Reed Relay |
| Relay Life | 10^8 Cycles (10V, 100mA) |
| Insulation | > 10GΩ |
| Switching Time | 555 μsec |
| Interface | |
| USB/Ethernet/GPIB/RS232 | |
| Physical Characteristics | |
| Dimensions | L 1950 x W 960 x H 1350 mm |
| Weight | 924 kg |
| Utilities Requirements | |
| Power | 220 V AC, one phase, 10A ( 50/60Hz) |
| Air | 80~100 psi / flow rate 10 cfm |
| Vacuum | 100 CFM factory vacuum for substrates retention |